SUMCO Plant: Albuquerque, NM

200mm Silicon Epitaxy Fab

Ground breaking:     November, 1993

First Epi Wafer:     October, 1994

Commercial Shipments: July, 1995

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Employees:    ~150 

Plant size:    85,000 ft2  (7900m2)

Cleanroom:    18,000 ft2  (1672m2) Class 10

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Epi Reactors: Centura (2 or 3 Chamber systems)

ASM (Epsilon 2000) 

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Capacity: (mix dependent)

Single and Multi-Layer Epi Products
(1, 2, 3 layers and Graded Epi)
Thickness: 2 – 140µm
Diameter: 200mm
Substrate Dopant: Antimony, Arsenic, Red Phos, Boron
Epi Dopant: Phosphine, Arsine, Diborane

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Products:
CMOS
CIS
LV Mosfet
MV/HV Mosfets
IGBT